Electric Slider, EZS Series

The EZS Series is a compact, high stiffness, simple dust-proof electric slider.
Equipped with AlphaStep AZ Series and AR Series in the motor part. High response, low vibration, and movement without hunting, which are unique to stepper motors, are realized with an electric slider.
[Features]
・ High stiffness and low profile guide
・ Space saving by the folded motor
・ Simple dust-proof structure prevents foreign object from entering and suppresses dust generation
・ Cleanroom compatible

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Part Numbers

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Part Number
EZS3-D005-ARMC
EZS3CL-D005-AZAC-3
EZS4-D040-ARAC
EZS6-D055-ARAC-2
EZS6-E085-ARAC-3
EZSM3CLD005AZAC
EZSM3CLD050AZAC
EZSM3D020AZAC
EZSM3D025AZAC
EZSM3D030AZAC
EZSM3D045AZAC
EZSM3D050AZAC
EZSM3D070AZMC
EZSM3E005AZMC
EZSM3E010AZAC
EZSM3E015AZAC
EZSM3E020AZMC
EZSM3E025AZAC
EZSM3E050AZMC
EZSM3LD035AZAC
EZSM3RD010AZAC
EZSM3RD065AZAC
EZSM3RE015AZMC
EZSM3RE070AZMC
EZSM4CLD005AZAC
EZSM4CLD055AZAC
EZSM4CRD050AZAC
EZSM4D025AZAC
EZSM4D030AZAC
EZSM4D040AZAC
EZSM4D045AZAC
EZSM4D050AZAC
EZSM4D060ARAC
EZSM4E015AZAC
EZSM4E020AZAC
EZSM4E020AZMC
EZSM4E025AZAC
EZSM4E025AZMC
EZSM4E030AZAC
EZSM4E030AZMC
EZSM4E035AZAC
EZSM4E040AZAC
EZSM4E040AZMC
EZSM4LD025AZAC
EZSM4LE030AZAC
EZSM4LE035AZAC
EZSM4RD025AZAC
EZSM6CLD040AZAC
EZSM6CLD060AZAC
EZSM6CLE065AZMC
EZSM6D020AZAC
EZSM6D020AZMC
EZSM6D025AZMC
EZSM6D060AZAC
EZSM6D060AZMC
EZSM6D065AZAC
EZSM6D070AZAC
EZSM6D080AZAC
EZSM6D085AZAC
EZSM6E010AZAC

Standard Unit Price	Minimum order quantity	Standard Shipping Days ?	Stroke (mm)	Max. Transportable Mass Range (Horizontal) (kg)	Max. Transportable Mass (Horizontal) (kg)	Max. Transportable Mass Range (Vertical) (kg)	Max. Transportable Mass (Vertical) (kg)	Input Power Supply	Table Width W1 (mm)	Electromagnetic Break	Max. Thrust Force Range (N)	Max. Thrust Force (N)	Cable	Table Length L1 (mm)	Maximum Velocity (mm/sec)	Motor Mounting Direction	Driver Type	Slider Size (mm)	On-Board Motor	Motor Part Shape	Suction Fitting Direction	Product Type
1,173.96 €	1	38 Days	50	5.1 to 10.0	7.5	2.1 to 5.0	3.5	Single Phase 200-230 VAC	54	Included	0 to 100	43	Not Included	72	800	Straight	Pulse Train Input Type	Width 54 × Height 50	AR Series	With electromagnetic brake	-	Actuator + driver set product
1,215.53 €	1	68 Days	50	5.1 to 10.0	7.5	-	-	Single Phase 200-230 VAC	54	Not Included	0 to 100	43	Standard 3 m	72	800	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	Suction fitting left direction	Actuator + driver set product
1,127.21 €	1	38 Days	400	10.1 to 20.0	15	-	-	Single Phase 200-230 VAC	-	Not Included	0 to 100	70	Not Included	72	800	Straight	Pulse Train Input Type	Width 74 × Height 50	AR Series	Single axis shaft	-	Actuator + driver set product
1,455.50 €	1	38 Days	550	20.1 to 50.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	101 to 200	200	Standard 2 m	108	800	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AR Series	Single axis shaft	-	Actuator + driver set product
1,532.91 €	1	38 Days	850	50.1 to 100.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	301 to 500	400	Standard 3 m	108	180	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AR Series	Single axis shaft	-	Actuator + driver set product
758.18 €	1	18 Days	50	5.1 to 10.0	7.5	-	-	Single Phase 200-230 VAC	54	Not Included	0 to 100	43	Not Included	72	800	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	Suction fitting left direction	Individual actuator
856.89 €	1	18 Days	500	5.1 to 10.0	7.5	-	-	Single Phase 200-230 VAC	54	Not Included	0 to 100	43	Not Included	72	800	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	Suction fitting left direction	Individual actuator
669.44 €	1	18 Days	200	5.1 to 10.0	7.5	-	-	Single Phase 200-230 VAC	54	Not Included	0 to 100	43	Not Included	72	800	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
693.03 €	1	18 Days	250	5.1 to 10.0	7.5	-	-	Single Phase 200-230 VAC	54	Not Included	0 to 100	43	Not Included	72	800	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
693.86 €	1	18 Days	300	5.1 to 10.0	7.5	-	-	Single Phase 200-230 VAC	54	Not Included	0 to 100	43	Not Included	72	800	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
741.98 €	1	18 Days	450	5.1 to 10.0	7.5	-	-	Single Phase 200-230 VAC	54	Not Included	0 to 100	43	Not Included	72	800	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
742.80 €	1	18 Days	500	5.1 to 10.0	7.5	-	-	Single Phase 200-230 VAC	54	Not Included	0 to 100	43	Not Included	72	800	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
952.30 €	1	18 Days	700	5.1 to 10.0	7.5	2.1 to 5.0	3.5	Single Phase 200-230 VAC	54	Included	0 to 100	43	Not Included	72	400	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	With electromagnetic brake	-	Individual actuator
804.76 €	1	18 Days	50	10.1 to 20.0	15	5.1 to 10.0	7	Single Phase 200-230 VAC	54	Included	0 to 100	86	Not Included	72	400	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	With electromagnetic brake	-	Individual actuator
644.90 €	1	18 Days	100	10.1 to 20.0	15	-	-	Single Phase 200-230 VAC	54	Not Included	0 to 100	86	Not Included	72	400	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
668.62 €	1	18 Days	150	10.1 to 20.0	15	-	-	Single Phase 200-230 VAC	54	Not Included	0 to 100	86	Not Included	72	400	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
830.00 €	1	18 Days	200	10.1 to 20.0	15	5.1 to 10.0	7	Single Phase 200-230 VAC	54	Included	0 to 100	86	Not Included	72	400	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	With electromagnetic brake	-	Individual actuator
693.03 €	1	18 Days	250	10.1 to 20.0	15	-	-	Single Phase 200-230 VAC	54	Not Included	0 to 100	86	Not Included	72	400	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
903.48 €	1	18 Days	500	10.1 to 20.0	15	5.1 to 10.0	7	Single Phase 200-230 VAC	54	Included	0 to 100	86	Not Included	72	400	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	With electromagnetic brake	-	Individual actuator
717.44 €	1	18 Days	350	5.1 to 10.0	7.5	-	-	Single Phase 200-230 VAC	54	Not Included	0 to 100	43	Not Included	72	800	Left reversed motor	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
644.90 €	1	18 Days	100	5.1 to 10.0	7.5	-	-	Single Phase 200-230 VAC	54	Not Included	0 to 100	43	Not Included	72	800	Right reversed motor	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
790.92 €	1	18 Days	650	5.1 to 10.0	7.5	-	-	Single Phase 200-230 VAC	54	Not Included	0 to 100	43	Not Included	72	460	Right reversed motor	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
829.17 €	1	18 Days	150	10.1 to 20.0	15	5.1 to 10.0	7	Single Phase 200-230 VAC	54	Included	0 to 100	86	Not Included	72	400	Right reversed motor	Pulse Train Input Type	Width 54 × Height 50	AZ Series	With electromagnetic brake	-	Individual actuator
952.30 €	1	18 Days	700	10.1 to 20.0	15	5.1 to 10.0	7	Single Phase 200-230 VAC	54	Included	0 to 100	86	Not Included	72	200	Right reversed motor	Pulse Train Input Type	Width 54 × Height 50	AZ Series	With electromagnetic brake	-	Individual actuator
794.86 €	1	18 Days	50	10.1 to 20.0	15	-	-	Single Phase 200-230 VAC	-	Not Included	0 to 100	70	Not Included	72	800	Straight	Pulse Train Input Type	Width 74 × Height 50	AZ Series	Single axis shaft	Suction fitting left direction	Individual actuator
921.44 €	1	18 Days	550	10.1 to 20.0	15	-	-	Single Phase 200-230 VAC	-	Not Included	0 to 100	70	Not Included	72	650	Straight	Pulse Train Input Type	Width 74 × Height 50	AZ Series	Single axis shaft	Suction fitting left direction	Individual actuator
897.28 €	1	18 Days	500	10.1 to 20.0	15	-	-	Single Phase 200-230 VAC	-	Not Included	0 to 100	70	Not Included	72	800	Straight	Pulse Train Input Type	Width 74 × Height 50	AZ Series	Single axis shaft	Suction fitting right direction	Individual actuator
731.42 €	1	18 Days	250	10.1 to 20.0	15	-	-	Single Phase 200-230 VAC	-	Not Included	0 to 100	70	Not Included	72	800	Straight	Pulse Train Input Type	Width 74 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
732.68 €	1	18 Days	300	10.1 to 20.0	15	-	-	Single Phase 200-230 VAC	-	Not Included	0 to 100	70	Not Included	72	800	Straight	Pulse Train Input Type	Width 74 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
757.90 €	1	18 Days	400	10.1 to 20.0	15	-	-	Single Phase 200-230 VAC	-	Not Included	0 to 100	70	Not Included	72	800	Straight	Pulse Train Input Type	Width 74 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
781.93 €	1	18 Days	450	10.1 to 20.0	15	-	-	Single Phase 200-230 VAC	-	Not Included	0 to 100	70	Not Included	72	800	Straight	Pulse Train Input Type	Width 74 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
783.19 €	1	18 Days	500	10.1 to 20.0	15	-	-	Single Phase 200-230 VAC	-	Not Included	0 to 100	70	Not Included	72	800	Straight	Pulse Train Input Type	Width 74 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
671.73 €	1	28 Days	600	10.1 to 20.0	15	-	-	Single Phase 200-230 VAC	-	Not Included	0 to 100	70	Not Included	72	550	Straight	Pulse Train Input Type	Width 74 × Height 50	AR Series	Single axis shaft	-	Individual actuator
706.00 €	1	18 Days	150	20.1 to 50.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	101 to 200	125	Not Included	72	400	Straight	Pulse Train Input Type	Width 74 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
707.26 €	1	18 Days	200	20.1 to 50.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	101 to 200	125	Not Included	72	400	Straight	Pulse Train Input Type	Width 74 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
867.94 €	1	18 Days	200	20.1 to 50.0	-	-	-	Single Phase 200-230 VAC	-	Included	101 to 200	125	Not Included	72	400	Straight	Pulse Train Input Type	Width 74 × Height 50	AZ Series	With electromagnetic brake	-	Individual actuator
731.42 €	1	18 Days	250	20.1 to 50.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	101 to 200	125	Not Included	72	400	Straight	Pulse Train Input Type	Width 74 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
891.97 €	1	18 Days	250	20.1 to 50.0	-	-	-	Single Phase 200-230 VAC	-	Included	101 to 200	125	Not Included	72	400	Straight	Pulse Train Input Type	Width 74 × Height 50	AZ Series	With electromagnetic brake	-	Individual actuator
732.68 €	1	18 Days	300	20.1 to 50.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	101 to 200	125	Not Included	72	400	Straight	Pulse Train Input Type	Width 74 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
893.23 €	1	18 Days	300	20.1 to 50.0	-	-	-	Single Phase 200-230 VAC	-	Included	101 to 200	125	Not Included	72	400	Straight	Pulse Train Input Type	Width 74 × Height 50	AZ Series	With electromagnetic brake	-	Individual actuator
756.65 €	1	18 Days	350	20.1 to 50.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	101 to 200	125	Not Included	72	400	Straight	Pulse Train Input Type	Width 74 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
757.90 €	1	18 Days	400	20.1 to 50.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	101 to 200	125	Not Included	72	400	Straight	Pulse Train Input Type	Width 74 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
918.59 €	1	18 Days	400	20.1 to 50.0	-	-	-	Single Phase 200-230 VAC	-	Included	101 to 200	125	Not Included	72	400	Straight	Pulse Train Input Type	Width 74 × Height 50	AZ Series	With electromagnetic brake	-	Individual actuator
731.42 €	1	18 Days	250	10.1 to 20.0	15	-	-	Single Phase 200-230 VAC	-	Not Included	0 to 100	70	Not Included	72	800	Left reversed motor	Pulse Train Input Type	Width 74 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
732.68 €	1	18 Days	300	20.1 to 50.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	101 to 200	125	Not Included	72	400	Left reversed motor	Pulse Train Input Type	Width 74 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
756.65 €	1	18 Days	350	20.1 to 50.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	101 to 200	125	Not Included	72	400	Left reversed motor	Pulse Train Input Type	Width 74 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
731.42 €	1	18 Days	250	10.1 to 20.0	15	-	-	Single Phase 200-230 VAC	-	Not Included	0 to 100	70	Not Included	72	800	Right reversed motor	Pulse Train Input Type	Width 74 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
1,115.25 €	1	18 Days	400	20.1 to 50.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	101 to 200	200	Not Included	108	800	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	Single axis shaft	Suction fitting left direction	Individual actuator
1,166.55 €	1	18 Days	600	20.1 to 50.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	101 to 200	200	Not Included	108	800	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	Single axis shaft	Suction fitting left direction	Individual actuator
1,398.24 €	1	18 Days	650	50.1 to 100.0	-	20.1 to 50.0	-	Single Phase 200-230 VAC	-	Included	301 to 500	400	Not Included	108	300	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	Suction fitting left direction	Individual actuator
949.86 €	1	18 Days	200	20.1 to 50.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	101 to 200	200	Not Included	108	800	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	Single axis shaft	-	Individual actuator
1,157.40 €	1	18 Days	200	20.1 to 50.0	-	10.1 to 20.0	-	Single Phase 200-230 VAC	-	Included	101 to 200	200	Not Included	108	800	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	-	Individual actuator
1,181.59 €	1	18 Days	250	20.1 to 50.0	-	10.1 to 20.0	-	Single Phase 200-230 VAC	-	Included	101 to 200	200	Not Included	108	800	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	-	Individual actuator
1,052.46 €	1	18 Days	600	20.1 to 50.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	101 to 200	200	Not Included	108	800	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	Single axis shaft	-	Individual actuator
1,259.88 €	1	18 Days	600	20.1 to 50.0	-	10.1 to 20.0	-	Single Phase 200-230 VAC	-	Included	101 to 200	200	Not Included	108	800	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	-	Individual actuator
1,076.60 €	1	18 Days	650	20.1 to 50.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	101 to 200	200	Not Included	108	640	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	Single axis shaft	-	Individual actuator
1,078.03 €	1	18 Days	700	20.1 to 50.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	101 to 200	200	Not Included	108	550	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	Single axis shaft	-	Individual actuator
1,103.59 €	1	18 Days	800	20.1 to 50.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	101 to 200	200	Not Included	108	420	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	Single axis shaft	-	Individual actuator
1,127.90 €	1	18 Days	850	20.1 to 50.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	101 to 200	200	Not Included	108	-	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	Single axis shaft	-	Individual actuator
924.30 €	1	18 Days	100	50.1 to 100.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	301 to 500	400	Not Included	108	400	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	Single axis shaft	-	Individual actuator

Basic information

Main Body, Peripheral Components	Main Body	Type	Sliders	Drive Method	Rolled Ball Screw
Guide	Included	Position Detection	Absolute	I/O Module	Not Included
Noise Filters	Not Included	Usage Environment	Standard

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Basic Attributes

Stroke(mm)
50

100

150

200

250

300

350

400

450

500

550

600

650

700

750

800

850
Clear
Max. Transportable Mass Range (Horizontal)(kg)
- 5.1 to 10.0
- 10.1 to 20.0
- 20.1 to 50.0
- 50.1 to 100.0
Clear
Max. Transportable Mass (Horizontal)(kg)
7.5

15
Clear
Max. Transportable Mass Range (Vertical)(kg)
- 2.1 to 5.0
- 5.1 to 10.0
- 10.1 to 20.0
- 20.1 to 50.0
Clear
Max. Transportable Mass (Vertical)(kg)
3.5

7

12.5

14
Clear
Table Width W1(mm)
54
Clear
Electromagnetic Break
- Not Included
- Included
Clear
Max. Thrust Force Range(N)
- 0 to 100
- 101 to 200
- 301 to 500
Clear
Max. Thrust Force(N)
43

70

86

125

200

360

400
Clear
Cable
Standard 1 m

Standard 3 m

Not Included

Standard 2 m
Clear
Table Length L1(mm)
72

108
Clear
Maximum Velocity(mm/sec)
180

200

220

230

260

270

300

350

400

420

460

470

550

600

640

650

800
Clear
Motor Mounting Direction
- Left reversed motor
- Right reversed motor
- Straight
Clear
Driver Type
- Positioning function built-in type
- Pulse Train Input Type
Clear
Slider Size(mm)
- Width 54 × Height 50
- Width 74 × Height 50
- Width 74 × Height 66.5
Clear
On-Board Motor
- AR Series
- AZ Series
Clear
Motor Part Shape
- Single axis shaft
- With electromagnetic brake
Clear
Suction Fitting Direction
- Suction fitting left direction
- Suction fitting right direction
Clear
Product Type
- Actuator + driver set product
- Individual actuator
Clear
Type
- EZS3
- EZS4
- EZS6
- EZSM3
- EZSM4
- EZSM6
Clear
Input Power Supply
Single Phase 100-115 VAC

Single Phase 200-230 VAC

3-phase 200-230 VAC

Single Phase 200-240 VAC

24/48 V DC
Clear