Single Axis Robots(Max. Thrust Force Range:101 to 200)

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Brand
Product Series
CAD
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Min. Shipping Days
Main Body, Peripheral Components
Type
Stroke(mm)
Max. Transportable Mass Range (Horizontal)(kg)
Max. Transportable Mass (Horizontal)(kg)
Max. Transportable Mass Range (Vertical)(kg)
Max. Transportable Mass (Vertical)(kg)
Drive Method
Guide
Lead(mm)
Input Power Supply
Position Detection
I/O Module
Table Width W1(mm)
Brake
Max. Thrust Force Range(N)
Max. Thrust Force(N)
Noise Filters
Table Length L1(mm)
Usage Environment
Positioning Repeatability(µm)
Maximum Velocity(mm/sec)

    Electric Actuator Slider Type Ball Screw Drive LEFS Series Step Motor/Servo Motor

      Electric Actuator Rod Type LEY Series Step Motor/Servo Motor

        Electric actuator rod type motorless specification LEY series

          Electric actuator rod type LEY series AC servo motor LECS□

          • Promotional pricing

          Electric Slide Table, Compact Type LES Series

            Electric slide table high rigidity type LESH series

              Electric actuator slider type ball screw drive LEFS series AC servo motor LECS□

                Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series, LECS□

                  Electric actuator rod type with guide motorless specification LEYG series

                    Electric actuator slider type belt drive motorless specification LEFB series

                      Electric Actuator Rod With Guide Type LEYG Series Step Motor/Servo Motor

                      • Promotional pricing

                      Electric Actuator, Slider Type, Ball Screw Drive, Motorless Type LEFS Series

                        Electric cylinder LZB series

                          Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECS□

                            Single Axis Robots RS1 / Linear

                              Electric actuator high rigidity slider type ball screw drive motorless specification LEJS series

                                Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECS□

                                  Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series, LECS□

                                    Single Axis Robot RSH1

                                      Electric actuator slider type belt drive LEFB series AC servo motor LECY□

                                        Electric actuator rod type LEY series AC servo motor LECY□

                                          Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series

                                            Electric Slider, EAS Series

                                              Single Axis Robots RS3 Motor Wrap

                                                Single Axis Robots RSD2 / Rod Type

                                                  Rod Type with Support Guide

                                                    Electric cylinder LZC series

                                                      Electric actuator slider type belt drive LEFB series AC servo motor LECS□

                                                        Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECY□

                                                          Electric Actuator, Low Profile Slider Type, Basic Type, LEMB Series, Step Motor

                                                            Electric Actuator Low Profile Slider Type, Cam Follower Guide Type, LEMC Series Step Motor

                                                              Electric actuator guided rod type LEYG series AC servo motor LECS□

                                                                Electric actuator rod type with guide LEYG series AC servo motor LECY□

                                                                  Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series

                                                                    Electric Cylinder, EAC Series

                                                                      Electric Slider, EZS Series

                                                                        Single Axis Robots RS3 / Linear

                                                                          Single Axis Robot RSH2

                                                                            Single Axis Robot RSH3

                                                                              Single Axis Robots RS1 / Motor Wrap

                                                                                Electric actuator slider type ball screw drive LEFS series AC servo motor LECY□

                                                                                  Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECY□

                                                                                    Electric Actuator, Low Profile Slider Type, Linear Guide 1-Axis/2-Axis, LEMH/LEMHT Series

                                                                                    Brand

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    MISUMI

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    MISUMI

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    ORIENTAL MOTOR

                                                                                    MISUMI

                                                                                    MISUMI

                                                                                    MISUMI

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    ORIENTAL MOTOR

                                                                                    ORIENTAL MOTOR

                                                                                    MISUMI

                                                                                    MISUMI

                                                                                    MISUMI

                                                                                    MISUMI

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    Product Series

                                                                                    Electric Actuator Slider Type Ball Screw Drive LEFS Series Step Motor/Servo Motor

                                                                                    Electric Actuator Rod Type LEY Series Step Motor/Servo Motor

                                                                                    Electric actuator rod type motorless specification LEY series

                                                                                    Electric actuator rod type LEY series AC servo motor LECS□

                                                                                    Electric Slide Table, Compact Type LES Series

                                                                                    Electric slide table high rigidity type LESH series

                                                                                    Electric actuator slider type ball screw drive LEFS series AC servo motor LECS□

                                                                                    Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series, LECS□

                                                                                    Electric actuator rod type with guide motorless specification LEYG series

                                                                                    Electric actuator slider type belt drive motorless specification LEFB series

                                                                                    Electric Actuator Rod With Guide Type LEYG Series Step Motor/Servo Motor

                                                                                    Electric Actuator, Slider Type, Ball Screw Drive, Motorless Type LEFS Series

                                                                                    Electric cylinder LZB series

                                                                                    Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECS□

                                                                                    Single Axis Robots RS1 / Linear

                                                                                    Electric actuator high rigidity slider type ball screw drive motorless specification LEJS series

                                                                                    Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECS□

                                                                                    Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series, LECS□

                                                                                    Single Axis Robot RSH1

                                                                                    Electric actuator slider type belt drive LEFB series AC servo motor LECY□

                                                                                    Electric actuator rod type LEY series AC servo motor LECY□

                                                                                    Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series

                                                                                    Electric Slider, EAS Series

                                                                                    Single Axis Robots RS3 Motor Wrap

                                                                                    Single Axis Robots RSD2 / Rod Type

                                                                                    Rod Type with Support Guide

                                                                                    Electric cylinder LZC series

                                                                                    Electric actuator slider type belt drive LEFB series AC servo motor LECS□

                                                                                    Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECY□

                                                                                    Electric Actuator, Low Profile Slider Type, Basic Type, LEMB Series, Step Motor

                                                                                    Electric Actuator Low Profile Slider Type, Cam Follower Guide Type, LEMC Series Step Motor

                                                                                    Electric actuator guided rod type LEYG series AC servo motor LECS□

                                                                                    Electric actuator rod type with guide LEYG series AC servo motor LECY□

                                                                                    Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series

                                                                                    Electric Cylinder, EAC Series

                                                                                    Electric Slider, EZS Series

                                                                                    Single Axis Robots RS3 / Linear

                                                                                    Single Axis Robot RSH2

                                                                                    Single Axis Robot RSH3

                                                                                    Single Axis Robots RS1 / Motor Wrap

                                                                                    Electric actuator slider type ball screw drive LEFS series AC servo motor LECY□

                                                                                    Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECY□

                                                                                    Electric Actuator, Low Profile Slider Type, Linear Guide 1-Axis/2-Axis, LEMH/LEMHT Series

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                                                                                    Starting from

                                                                                    1,357.93 €

                                                                                    *Unit price with basic configuration

                                                                                    595.53 €

                                                                                    *Unit price with basic configuration

                                                                                    560.14 €

                                                                                    *Unit price with basic configuration

                                                                                    1,000.57 €

                                                                                    *Unit price with basic configuration

                                                                                    871.80 €

                                                                                    Special price

                                                                                    *Unit price with basic configuration

                                                                                    Promotional pricing

                                                                                    927.37 €

                                                                                    *Unit price with basic configuration

                                                                                    1,432.34 €

                                                                                    *Unit price with basic configuration

                                                                                    1,296.96 €

                                                                                    *Unit price with basic configuration

                                                                                    768.09 €

                                                                                    *Unit price with basic configuration

                                                                                    1,485.56 €

                                                                                    *Unit price with basic configuration

                                                                                    760.19 €

                                                                                    *Unit price with basic configuration

                                                                                    968.29 €

                                                                                    Special price

                                                                                    *Unit price with basic configuration

                                                                                    Promotional pricing

                                                                                    495.89 €

                                                                                    *Unit price with basic configuration

                                                                                    2,232.19 €

                                                                                    *Unit price with basic configuration

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                                                                                    2,145.69 €

                                                                                    *Unit price with basic configuration

                                                                                    2,814.41 €

                                                                                    *Unit price with basic configuration

                                                                                    1,348.27 €

                                                                                    *Unit price with basic configuration

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                                                                                    2,602.01 €

                                                                                    *Unit price with basic configuration

                                                                                    1,181.27 €

                                                                                    *Unit price with basic configuration

                                                                                    1,065.37 €

                                                                                    *Unit price with basic configuration

                                                                                    679.95 €

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                                                                                    546.19 €

                                                                                    *Unit price with basic configuration

                                                                                    2,028.77 €

                                                                                    *Unit price with basic configuration

                                                                                    2,841.41 €

                                                                                    *Unit price with basic configuration

                                                                                    688.44 €

                                                                                    *Unit price with basic configuration

                                                                                    1,282.18 €

                                                                                    *Unit price with basic configuration

                                                                                    1,213.06 €

                                                                                    *Unit price with basic configuration

                                                                                    1,570.63 €

                                                                                    *Unit price with basic configuration

                                                                                    1,091.16 €

                                                                                    *Unit price with basic configuration

                                                                                    532.55 €

                                                                                    *Unit price with basic configuration

                                                                                    681.97 €

                                                                                    *Unit price with basic configuration

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                                                                                    1,513.19 €

                                                                                    *Unit price with basic configuration

                                                                                    2,392.26 €

                                                                                    *Unit price with basic configuration

                                                                                    1,567.53 €

                                                                                    *Unit price with basic configuration

                                                                                    Min. Shipping Days 7 Days 7 Days 9 Days 26 Days 26 Days 26 Days 26 Days 26 Days 9 Days 26 Days 7 Days 9 Days 26 Days 26 Days 14 Days 26 Days 26 Days 26 Days 19 Days 26 Days 26 Days 26 Days 18 Days 14 Days 14 Days 14 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 18 Days 18 Days 14 Days 19 Days 19 Days 14 Days 26 Days 26 Days 26 Days
                                                                                    Main Body, Peripheral ComponentsMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain Body
                                                                                    TypeSlidersRodsRodsRodsSlidersSlidersSlidersRodsRodsSlidersRodsSlidersRodsSlidersSlidersSlidersSlidersSlidersSlidersSlidersRodsRodsSlidersSlidersRodsRodsRodsSlidersSlidersSlidersSlidersRodsRodsSlidersSlidersSlidersSlidersSlidersSlidersSlidersSlidersSlidersSliders
                                                                                    Stroke(mm)1,000 ~ 95030 ~ 50030 ~ 50030 ~ 50030 ~ 15050 ~ 15050 ~ 75050 ~ 40030 ~ 3001,000 ~ 250030 ~ 30050 ~ 80025 ~ 2001,000 ~ 90050 ~ 4001,000 ~ 9001,200 ~ 800100 ~ 500150 ~ 8001,000 ~ 250030 ~ 50030 ~ 50050 ~ 85050 ~ 80050 ~ 30050 ~ 30025 ~ 2001,000 ~ 2500200 ~ 4001,000 ~ 17001,000 ~ 170030 ~ 30050 ~ 30050 ~ 60050 ~ 30050 ~ 85050 ~ 800150 ~ 1050150 ~ 105050 ~ 40050 ~ 7001,000 ~ 8001,000 ~ 1400
                                                                                    Max. Transportable Mass Range (Horizontal)(kg)10.1 to 20.010.1 to 20.0 / 20.1 to 50.010.1 to 20.0 / 20.1 to 50.010.1 to 20.0 / 20.1 to 50.02.1 to 5.010.1 to 20.010.1 to 20.010.1 to 20.0 / 20.1 to 50.010.1 to 20.0 / 20.1 to 50.010.1 to 20.010.1 to 20.0 / 20.1 to 50.010.1 to 20.010.1 to 20.010.1 to 20.05.1 to 10.010.1 to 20.010.1 to 20.010.1 to 20.010.1 to 20.010.1 to 20.010.1 to 20.0 / 20.1 to 50.020.1 to 50.020.1 to 50.010.1 to 20.020.1 to 50.020.1 to 50.010.1 to 20.010.1 to 20.010.1 to 20.010.1 to 20.010.1 to 20.010.1 to 20.0 / 20.1 to 50.010.1 to 20.0 / 20.1 to 50.010.1 to 20.0 / 20.1 to 50.020.1 to 50.020.1 to 50.010.1 to 20.020.1 to 50.050.1 to 100.05.1 to 10.010.1 to 20.010.1 to 20.010.1 to 20.0
                                                                                    Max. Transportable Mass (Horizontal)(kg)11 ~ 2012 ~ 4018 ~ 3018 ~ 305122018 ~ 3018 ~ 301512 ~ 402011.9 ~ 20206151520201518 ~ 3030 ~ 40-122525 ~ 4011.9 ~ 201515112018 ~ 3018 ~ 6011 ~ 30--1240606202020
                                                                                    Max. Transportable Mass Range (Vertical)(kg)0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.05.1 to 10.0 / 10.1 to 20.05.1 to 10.0 / 10.1 to 20.05.1 to 10.0 / 10.1 to 20.02.1 to 5.02.1 to 5.05.1 to 10.0 / 10.1 to 20.05.1 to 10.0 / 10.1 to 20.05.1 to 10.0-5.1 to 10.0 / 10.1 to 20.05.1 to 10.0 / 10.1 to 20.0--2.1 to 5.02.1 to 5.02.1 to 5.05.1 to 10.0 / 10.1 to 20.02.1 to 5.0-5.1 to 10.05.1 to 10.0 / 10.1 to 20.010.1 to 20.02.1 to 5.02.1 to 5.02.1 to 5.0--2.1 to 5.0--5.1 to 10.05.1 to 10.00 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.010.1 to 20.010.1 to 20.02.1 to 5.05.1 to 10.0-2.1 to 5.05.1 to 10.0 / 10.1 to 20.0--
                                                                                    Max. Transportable Mass (Vertical)(kg)0.5 ~ 158 ~ 128 ~ 128 ~ 12548 ~ 158 ~ 127 ~ 10-7 ~ 118 ~ 15--4338 ~ 154-8 ~ 97 ~ 1114454 ~ 11--3--7 ~ 107 ~ 172 ~ 151412.5 ~ 1448-48 ~ 15--
                                                                                    Drive MethodRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewSlide ScrewsSlide ScrewsRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewBeltsRolled Ball ScrewRolled Ball ScrewSlide ScrewsBeltsRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewBeltsRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewBeltsRolled Ball ScrewBeltsBeltsRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewBeltsBelts
                                                                                    GuideProvidedNot ProvidedProvidedNot ProvidedProvidedProvidedProvidedNot ProvidedProvidedProvidedProvidedProvidedNot ProvidedProvided-ProvidedProvidedProvided-ProvidedNot ProvidedNot ProvidedProvided-Not ProvidedProvidedNot ProvidedProvidedProvidedProvidedProvidedProvidedProvidedProvidedNot Provided / ProvidedProvided----ProvidedProvidedProvided
                                                                                    Lead(mm)5 ~ 302.5 ~ 1612 ~ 2012 ~ 20886 ~ 1212 ~ 2012 ~ 2054 equivalent2.5 ~ 166 ~ 122 ~ 627224246 ~ 121254 equivalent12 ~ 203 ~ 16-6126 ~ 122 ~ 654 equivalent24Equivalent to 48Equivalent to 4812 ~ 2010 ~ 125 ~ 12--6101026 ~ 1227Equivalent to 48
                                                                                    Input Power Supply24 V DC24 V DC--24 V DC24 V DC----24 V DC-24 V DC-24 V DC---Single-Phase, 200 to 230 V AC--24 V DC24/48 V DC ~ Single-Phase, 200 to 240 V AC24 V DC24 V DC24 V DC24 V DC--24 V DC24 V DC--24 V DC24/48 V DC ~ Single-Phase, 200 to 240 V AC24/48 V DC ~ Single-Phase, 200 to 230 V AC24 V DCSingle-Phase, 200 to 230 V ACSingle-Phase, 200 to 230 V AC24 V DC--24 V DC
                                                                                    Position DetectionIncrementalIncremental-Incremental / AbsoluteIncrementalIncrementalIncremental / AbsoluteIncremental / Absolute--IncrementalIncremental-Incremental / AbsoluteIncremental-Incremental / AbsoluteIncremental / AbsoluteIncremental / AbsoluteAbsoluteAbsoluteIncrementalAbsoluteIncrementalIncrementalIncremental-Incremental / AbsoluteAbsoluteIncrementalIncrementalIncremental / AbsoluteAbsoluteIncrementalAbsoluteAbsoluteIncrementalIncremental / AbsoluteIncremental / AbsoluteIncrementalAbsoluteAbsoluteIncremental
                                                                                    I/O ModuleNPN / PNP / DeviceNet / Ethernet / EtherCAT / IO-Link / PROFINETNPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINET--NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINETNPN / PNP / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINET----NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET-PNP / Not Provided-NPN / PNP / CC-Link / DeviceNet---NPN / PNP / CC-Link / DeviceNet--PNP / Ethernet / Not ProvidedNot ProvidedNPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNetPNP / Not Provided--NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINETNPN / PNP / Ethernet / Not Provided / PROFINET--NPN / PNP / Ethernet / Not Provided / PROFINETNot ProvidedNot ProvidedNPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNet---NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET
                                                                                    Table Width W1(mm)39.4 ~ 74---606150--60-50-10541105105508060--36 ~ 8752---6010561108.7--39.4 ~ 50--528080415010571.7 ~ 124.7
                                                                                    BrakeNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot ProvidedNot Provided / ProvidedNot ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot Provided / ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / Provided
                                                                                    Max. Thrust Force Range(N)101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200
                                                                                    Max. Thrust Force(N)107.8 ~ 196111 ~ 189131 ~ 197131 ~ 197180180196131 ~ 197131 ~ 197147111 ~ 189196117 ~ 196196150147147196141147131 ~ 157122 ~ 189125 ~ 200120150150 ~ 300117 ~ 196147147107.8196131 ~ 197131 ~ 308107.8 ~ 294125 ~ 200125 ~ 200120169169150196196196
                                                                                    Noise FiltersNot Provided / ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided-Not ProvidedNot ProvidedNot ProvidedNot Provided / ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided---Not ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided-Not Provided / ProvidedNot Provided / Provided-Not ProvidedNot ProvidedNot Provided
                                                                                    Table Length L1(mm)72 ~ 170---133.5 ~ 316.5143 ~ 285102--122-102-1605816016010278122--65 ~ 8090---12216078100--72 ~ 102-72 ~ 108907815458102160100
                                                                                    Usage EnvironmentStandardStandardDust ResistantStandardStandard / Dust ResistantStandard / Dust ResistantStandardDust ResistantStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardDust ResistantStandard / Dust ResistantStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandard
                                                                                    Positioning Repeatability(µm)±15 ~ ±20±20±10 ~ ±20±20±50±50±10 ~ ±20±20±10 ~ ±20±60±20±10 ~ ±20-±40±20±10 ~ ±20±10 ~ ±20±20±20±60±10 ~ ±20±20-±20±20±20-±60±20±80±80±10 ~ ±20±20±15 ~ ±20--±20±10±10±20±10 ~ ±20±40±80
                                                                                    Maximum Velocity(mm/sec)1,200 ~ 1100125 ~ 5001,000 ~ 10001,000 ~ 10002001501,500 ~ 9001,000 ~ 9001,000 ~ 9002000125 ~ 500270 ~ 90033 ~ 1002000100410 ~ 1800410 ~ 1800360 ~ 90072020001,200 ~ 900100 ~ 400270 ~ 800300500250 ~ 50033 ~ 100200018001,0001,0001,000 ~ 9001,000 ~ 900250 ~ 500300 ~ 600300 ~ 800300600600100360 ~ 90020002000

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